4/11/2012	12:11:19 AM	Helium valve closed
4/11/2012	12:11:19 AM	PH3 valve closed
4/11/2012	12:11:19 AM	Main Vac valve closed
4/11/2012	12:11:19 AM	Bypass valve closed
4/11/2012	12:11:19 AM	H2 valve opened
4/11/2012	12:11:19 AM	BCl3 valve opened
4/11/2012	12:11:19 AM	SiCl4 pre valve opened
4/11/2012	12:11:19 AM	SiCl4 post valve opened
4/11/2012	12:11:19 AM	Bubbler valve opened
4/11/2012	12:11:19 AM	Helium MFC set to  0.000000
4/11/2012	12:11:19 AM	H2 MFC set to  450.000000
4/11/2012	12:11:19 AM	BCl3 MFC set to  1.000000
4/11/2012	12:11:19 AM	PH3 MFC set to  0.000000
4/11/2012	12:11:19 AM	SiCl4 MFC set to  50.000000
4/11/2012	12:11:19 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	12:11:20 AM	Tube furnace set to 1000
4/11/2012	12:40:19 AM	Helium valve closed
4/11/2012	12:40:19 AM	BCl3 valve closed
4/11/2012	12:40:19 AM	PH3 valve closed
4/11/2012	12:40:19 AM	SiCl4 pre valve closed
4/11/2012	12:40:20 AM	SiCl4 post valve closed
4/11/2012	12:40:20 AM	Main Vac valve closed
4/11/2012	12:40:20 AM	Bypass valve closed
4/11/2012	12:40:20 AM	H2 valve opened
4/11/2012	12:40:20 AM	Bubbler valve opened
4/11/2012	12:40:20 AM	Helium MFC set to  0.000000
4/11/2012	12:40:20 AM	H2 MFC set to  500.000000
4/11/2012	12:40:20 AM	BCl3 MFC set to  0.000000
4/11/2012	12:40:20 AM	PH3 MFC set to  0.000000
4/11/2012	12:40:20 AM	SiCl4 MFC set to  0.000000
4/11/2012	12:40:20 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	12:40:20 AM	Tube furnace set to 750
4/11/2012	12:55:20 AM	H2 valve closed
4/11/2012	12:55:20 AM	BCl3 valve closed
4/11/2012	12:55:20 AM	PH3 valve closed
4/11/2012	12:55:20 AM	SiCl4 pre valve closed
4/11/2012	12:55:20 AM	SiCl4 post valve closed
4/11/2012	12:55:20 AM	Main Vac valve closed
4/11/2012	12:55:20 AM	Bypass valve closed
4/11/2012	12:55:20 AM	Helium valve opened
4/11/2012	12:55:20 AM	Bubbler valve opened
4/11/2012	12:55:20 AM	Helium MFC set to  500.000000
4/11/2012	12:55:20 AM	H2 MFC set to  0.000000
4/11/2012	12:55:20 AM	BCl3 MFC set to  0.000000
4/11/2012	12:55:20 AM	PH3 MFC set to  0.000000
4/11/2012	12:55:20 AM	SiCl4 MFC set to  0.000000
4/11/2012	12:55:20 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	12:55:20 AM	Tube furnace set to 0
4/11/2012	1:15:20 AM	Helium valve closed
4/11/2012	1:15:20 AM	H2 valve closed
4/11/2012	1:15:20 AM	BCl3 valve closed
4/11/2012	1:15:20 AM	PH3 valve closed
4/11/2012	1:15:20 AM	SiCl4 pre valve closed
4/11/2012	1:15:20 AM	SiCl4 post valve closed
4/11/2012	1:15:20 AM	Main Vac valve closed
4/11/2012	1:15:20 AM	Bypass valve closed
4/11/2012	1:15:20 AM	Bubbler valve closed
4/11/2012	1:15:20 AM	Helium MFC set to  0.000000
4/11/2012	1:15:20 AM	H2 MFC set to  0.000000
4/11/2012	1:15:20 AM	BCl3 MFC set to  0.000000
4/11/2012	1:15:20 AM	PH3 MFC set to  0.000000
4/11/2012	1:15:20 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:15:20 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	1:15:20 AM	Tube furnace set to 0
4/11/2012	1:27:00 AM	Run aborted at 1:27 AM
4/11/2012	1:27:00 AM	Helium valve closed
4/11/2012	1:27:00 AM	H2 valve closed
4/11/2012	1:27:00 AM	BCl3 valve closed
4/11/2012	1:27:00 AM	PH3 valve closed
4/11/2012	1:27:00 AM	SiCl4 pre valve closed
4/11/2012	1:27:00 AM	SiCl4 post valve closed
4/11/2012	1:27:00 AM	Bypass valve closed
4/11/2012	1:27:00 AM	Main Vac valve closed
4/11/2012	1:27:00 AM	Bubbler valve closed
4/11/2012	1:27:00 AM	Helium MFC set to  0.000000
4/11/2012	1:27:00 AM	H2 MFC set to  0.000000
4/11/2012	1:27:00 AM	BCl3 MFC set to  0.000000
4/11/2012	1:27:00 AM	PH3 MFC set to  0.000000
4/11/2012	1:27:00 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:27:00 AM	Tube furnace set to 0
4/11/2012	1:27:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2012	1:27:03 AM	Recipe started at 1:27 AM
4/11/2012	1:27:03 AM	Helium valve closed
4/11/2012	1:27:03 AM	H2 valve closed
4/11/2012	1:27:03 AM	BCl3 valve closed
4/11/2012	1:27:03 AM	PH3 valve closed
4/11/2012	1:27:03 AM	SiCl4 pre valve closed
4/11/2012	1:27:03 AM	SiCl4 post valve closed
4/11/2012	1:27:03 AM	Main Vac valve closed
4/11/2012	1:27:03 AM	Bypass valve closed
4/11/2012	1:27:03 AM	Bubbler valve closed
4/11/2012	1:27:03 AM	Helium MFC set to  0.000000
4/11/2012	1:27:03 AM	H2 MFC set to  0.000000
4/11/2012	1:27:03 AM	BCl3 MFC set to  0.000000
4/11/2012	1:27:03 AM	PH3 MFC set to  0.000000
4/11/2012	1:27:03 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:27:03 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	1:27:03 AM	Tube furnace set to 0
4/11/2012	1:27:06 AM	H2 valve closed
4/11/2012	1:27:06 AM	BCl3 valve closed
4/11/2012	1:27:06 AM	PH3 valve closed
4/11/2012	1:27:06 AM	SiCl4 pre valve closed
4/11/2012	1:27:06 AM	SiCl4 post valve closed
4/11/2012	1:27:06 AM	Main Vac valve closed
4/11/2012	1:27:06 AM	Bypass valve closed
4/11/2012	1:27:06 AM	Bubbler valve closed
4/11/2012	1:27:06 AM	Helium valve opened
4/11/2012	1:27:06 AM	Helium MFC set to  500.000000
4/11/2012	1:27:06 AM	H2 MFC set to  0.000000
4/11/2012	1:27:06 AM	BCl3 MFC set to  0.000000
4/11/2012	1:27:06 AM	PH3 MFC set to  0.000000
4/11/2012	1:27:06 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:27:06 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	1:27:06 AM	Tube furnace set to 0
4/11/2012	1:27:11 AM	Helium valve closed
4/11/2012	1:27:11 AM	H2 valve closed
4/11/2012	1:27:11 AM	BCl3 valve closed
4/11/2012	1:27:11 AM	PH3 valve closed
4/11/2012	1:27:11 AM	SiCl4 pre valve closed
4/11/2012	1:27:11 AM	SiCl4 post valve closed
4/11/2012	1:27:11 AM	Main Vac valve closed
4/11/2012	1:27:11 AM	Bypass valve closed
4/11/2012	1:27:11 AM	Bubbler valve closed
4/11/2012	1:27:11 AM	Helium MFC set to  0.000000
4/11/2012	1:27:11 AM	H2 MFC set to  0.000000
4/11/2012	1:27:11 AM	BCl3 MFC set to  0.000000
4/11/2012	1:27:11 AM	PH3 MFC set to  0.000000
4/11/2012	1:27:11 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:27:11 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	1:27:11 AM	Tube furnace set to 0
4/11/2012	1:27:12 AM	Run finished at 1:27 AM
4/11/2012	1:27:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2012	1:32:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/11/2012	1:32:30 AM	Recipe started at 1:32 AM
4/11/2012	1:32:30 AM	Helium valve closed
4/11/2012	1:32:30 AM	H2 valve closed
4/11/2012	1:32:30 AM	BCl3 valve closed
4/11/2012	1:32:30 AM	PH3 valve closed
4/11/2012	1:32:30 AM	SiCl4 pre valve closed
4/11/2012	1:32:30 AM	SiCl4 post valve closed
4/11/2012	1:32:30 AM	Main Vac valve closed
4/11/2012	1:32:30 AM	Bubbler valve closed
4/11/2012	1:32:30 AM	Bypass valve opened
4/11/2012	1:32:30 AM	Helium MFC set to  0.000000
4/11/2012	1:32:30 AM	H2 MFC set to  0.000000
4/11/2012	1:32:30 AM	BCl3 MFC set to  0.000000
4/11/2012	1:32:30 AM	PH3 MFC set to  0.000000
4/11/2012	1:32:30 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:32:30 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	1:32:30 AM	Tube furnace set to 0
4/11/2012	1:33:31 AM	Helium valve closed
4/11/2012	1:33:31 AM	H2 valve closed
4/11/2012	1:33:31 AM	BCl3 valve closed
4/11/2012	1:33:31 AM	PH3 valve closed
4/11/2012	1:33:32 AM	SiCl4 pre valve closed
4/11/2012	1:33:32 AM	SiCl4 post valve closed
4/11/2012	1:33:32 AM	Main Vac valve closed
4/11/2012	1:33:32 AM	Bubbler valve closed
4/11/2012	1:33:32 AM	Bypass valve opened
4/11/2012	1:33:32 AM	Helium MFC set to  0.000000
4/11/2012	1:33:32 AM	H2 MFC set to  0.000000
4/11/2012	1:33:32 AM	BCl3 MFC set to  0.000000
4/11/2012	1:33:32 AM	PH3 MFC set to  0.000000
4/11/2012	1:33:32 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:33:32 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	1:33:32 AM	Tube furnace set to 0
4/11/2012	1:34:32 AM	Helium valve closed
4/11/2012	1:34:32 AM	H2 valve closed
4/11/2012	1:34:32 AM	BCl3 valve closed
4/11/2012	1:34:32 AM	PH3 valve closed
4/11/2012	1:34:32 AM	SiCl4 pre valve closed
4/11/2012	1:34:32 AM	SiCl4 post valve closed
4/11/2012	1:34:32 AM	Bypass valve closed
4/11/2012	1:34:32 AM	Bubbler valve closed
4/11/2012	1:34:32 AM	Main Vac valve opened
4/11/2012	1:34:32 AM	Helium MFC set to  0.000000
4/11/2012	1:34:32 AM	H2 MFC set to  0.000000
4/11/2012	1:34:32 AM	BCl3 MFC set to  0.000000
4/11/2012	1:34:32 AM	PH3 MFC set to  0.000000
4/11/2012	1:34:32 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:34:32 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	1:34:32 AM	Tube furnace set to 0
4/11/2012	1:34:33 AM	Run finished at 1:34 AM
4/11/2012	1:34:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/11/2012	1:34:39 AM	Recipe started at 1:34 AM
4/11/2012	1:34:39 AM	Helium valve closed
4/11/2012	1:34:39 AM	H2 valve closed
4/11/2012	1:34:39 AM	BCl3 valve closed
4/11/2012	1:34:39 AM	PH3 valve closed
4/11/2012	1:34:39 AM	SiCl4 pre valve closed
4/11/2012	1:34:39 AM	SiCl4 post valve closed
4/11/2012	1:34:39 AM	Bypass valve closed
4/11/2012	1:34:39 AM	Bubbler valve closed
4/11/2012	1:34:39 AM	Main Vac valve opened
4/11/2012	1:34:39 AM	Helium MFC set to  0.000000
4/11/2012	1:34:39 AM	H2 MFC set to  0.000000
4/11/2012	1:34:39 AM	BCl3 MFC set to  0.000000
4/11/2012	1:34:39 AM	PH3 MFC set to  0.000000
4/11/2012	1:34:39 AM	SiCl4 MFC set to  0.000000
4/11/2012	1:34:39 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	1:34:39 AM	Tube furnace set to 0
4/11/2012	3:04:39 AM	Helium valve closed
4/11/2012	3:04:39 AM	H2 valve closed
4/11/2012	3:04:39 AM	BCl3 valve closed
4/11/2012	3:04:39 AM	PH3 valve closed
4/11/2012	3:04:39 AM	SiCl4 pre valve closed
4/11/2012	3:04:39 AM	SiCl4 post valve closed
4/11/2012	3:04:39 AM	Main Vac valve closed
4/11/2012	3:04:39 AM	Bypass valve closed
4/11/2012	3:04:39 AM	Bubbler valve closed
4/11/2012	3:04:39 AM	Helium MFC set to  0.000000
4/11/2012	3:04:39 AM	H2 MFC set to  0.000000
4/11/2012	3:04:39 AM	BCl3 MFC set to  0.000000
4/11/2012	3:04:39 AM	PH3 MFC set to  0.000000
4/11/2012	3:04:39 AM	SiCl4 MFC set to  0.000000
4/11/2012	3:04:39 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	3:04:39 AM	Tube furnace set to 0
4/11/2012	3:04:42 AM	Helium valve closed
4/11/2012	3:04:42 AM	BCl3 valve closed
4/11/2012	3:04:42 AM	PH3 valve closed
4/11/2012	3:04:42 AM	SiCl4 pre valve closed
4/11/2012	3:04:42 AM	SiCl4 post valve closed
4/11/2012	3:04:42 AM	Main Vac valve closed
4/11/2012	3:04:42 AM	Bypass valve closed
4/11/2012	3:04:42 AM	Bubbler valve closed
4/11/2012	3:04:42 AM	H2 valve opened
4/11/2012	3:04:42 AM	Helium MFC set to  0.000000
4/11/2012	3:04:42 AM	H2 MFC set to  500.000000
4/11/2012	3:04:42 AM	BCl3 MFC set to  0.000000
4/11/2012	3:04:42 AM	PH3 MFC set to  0.000000
4/11/2012	3:04:42 AM	SiCl4 MFC set to  0.000000
4/11/2012	3:04:42 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	3:04:42 AM	Tube furnace set to 0
4/11/2012	3:05:48 AM	Helium valve closed
4/11/2012	3:05:48 AM	BCl3 valve closed
4/11/2012	3:05:48 AM	PH3 valve closed
4/11/2012	3:05:48 AM	SiCl4 pre valve closed
4/11/2012	3:05:48 AM	SiCl4 post valve closed
4/11/2012	3:05:48 AM	Main Vac valve closed
4/11/2012	3:05:48 AM	Bypass valve closed
4/11/2012	3:05:48 AM	H2 valve opened
4/11/2012	3:05:48 AM	Bubbler valve opened
4/11/2012	3:05:48 AM	Helium MFC set to  0.000000
4/11/2012	3:05:48 AM	H2 MFC set to  500.000000
4/11/2012	3:05:48 AM	BCl3 MFC set to  0.000000
4/11/2012	3:05:48 AM	PH3 MFC set to  0.000000
4/11/2012	3:05:48 AM	SiCl4 MFC set to  0.000000
4/11/2012	3:05:48 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	3:05:48 AM	Tube furnace set to 0
4/11/2012	3:05:49 AM	Helium valve closed
4/11/2012	3:05:49 AM	BCl3 valve closed
4/11/2012	3:05:49 AM	PH3 valve closed
4/11/2012	3:05:49 AM	SiCl4 pre valve closed
4/11/2012	3:05:49 AM	SiCl4 post valve closed
4/11/2012	3:05:49 AM	Main Vac valve closed
4/11/2012	3:05:49 AM	Bypass valve closed
4/11/2012	3:05:49 AM	H2 valve opened
4/11/2012	3:05:49 AM	Bubbler valve opened
4/11/2012	3:05:49 AM	Helium MFC set to  0.000000
4/11/2012	3:05:49 AM	H2 MFC set to  500.000000
4/11/2012	3:05:49 AM	BCl3 MFC set to  0.000000
4/11/2012	3:05:49 AM	PH3 MFC set to  0.000000
4/11/2012	3:05:49 AM	SiCl4 MFC set to  0.000000
4/11/2012	3:05:49 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	3:05:49 AM	Tube furnace set to 1000
4/11/2012	3:30:49 AM	Helium valve closed
4/11/2012	3:30:49 AM	PH3 valve closed
4/11/2012	3:30:49 AM	Main Vac valve closed
4/11/2012	3:30:49 AM	Bypass valve closed
4/11/2012	3:30:49 AM	H2 valve opened
4/11/2012	3:30:49 AM	BCl3 valve opened
4/11/2012	3:30:49 AM	SiCl4 pre valve opened
4/11/2012	3:30:49 AM	SiCl4 post valve opened
4/11/2012	3:30:49 AM	Bubbler valve opened
4/11/2012	3:30:49 AM	Helium MFC set to  0.000000
4/11/2012	3:30:49 AM	H2 MFC set to  450.000000
4/11/2012	3:30:49 AM	BCl3 MFC set to  1.000000
4/11/2012	3:30:49 AM	PH3 MFC set to  0.000000
4/11/2012	3:30:49 AM	SiCl4 MFC set to  50.000000
4/11/2012	3:30:49 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	3:30:49 AM	Tube furnace set to 1000
4/11/2012	3:59:49 AM	Helium valve closed
4/11/2012	3:59:49 AM	BCl3 valve closed
4/11/2012	3:59:49 AM	PH3 valve closed
4/11/2012	3:59:49 AM	SiCl4 pre valve closed
4/11/2012	3:59:49 AM	SiCl4 post valve closed
4/11/2012	3:59:49 AM	Main Vac valve closed
4/11/2012	3:59:49 AM	Bypass valve closed
4/11/2012	3:59:49 AM	H2 valve opened
4/11/2012	3:59:49 AM	Bubbler valve opened
4/11/2012	3:59:49 AM	Helium MFC set to  0.000000
4/11/2012	3:59:49 AM	H2 MFC set to  500.000000
4/11/2012	3:59:49 AM	BCl3 MFC set to  0.000000
4/11/2012	3:59:49 AM	PH3 MFC set to  0.000000
4/11/2012	3:59:49 AM	SiCl4 MFC set to  0.000000
4/11/2012	3:59:49 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	3:59:49 AM	Tube furnace set to 750
4/11/2012	4:14:49 AM	H2 valve closed
4/11/2012	4:14:49 AM	BCl3 valve closed
4/11/2012	4:14:49 AM	PH3 valve closed
4/11/2012	4:14:49 AM	SiCl4 pre valve closed
4/11/2012	4:14:49 AM	SiCl4 post valve closed
4/11/2012	4:14:49 AM	Main Vac valve closed
4/11/2012	4:14:49 AM	Bypass valve closed
4/11/2012	4:14:50 AM	Helium valve opened
4/11/2012	4:14:50 AM	Bubbler valve opened
4/11/2012	4:14:50 AM	Helium MFC set to  500.000000
4/11/2012	4:14:50 AM	H2 MFC set to  0.000000
4/11/2012	4:14:50 AM	BCl3 MFC set to  0.000000
4/11/2012	4:14:50 AM	PH3 MFC set to  0.000000
4/11/2012	4:14:50 AM	SiCl4 MFC set to  0.000000
4/11/2012	4:14:50 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	4:14:50 AM	Tube furnace set to 0
4/11/2012	4:34:50 AM	Helium valve closed
4/11/2012	4:34:50 AM	H2 valve closed
4/11/2012	4:34:50 AM	BCl3 valve closed
4/11/2012	4:34:50 AM	PH3 valve closed
4/11/2012	4:34:50 AM	SiCl4 pre valve closed
4/11/2012	4:34:50 AM	SiCl4 post valve closed
4/11/2012	4:34:50 AM	Main Vac valve closed
4/11/2012	4:34:50 AM	Bypass valve closed
4/11/2012	4:34:50 AM	Bubbler valve closed
4/11/2012	4:34:50 AM	Helium MFC set to  0.000000
4/11/2012	4:34:50 AM	H2 MFC set to  0.000000
4/11/2012	4:34:50 AM	BCl3 MFC set to  0.000000
4/11/2012	4:34:50 AM	PH3 MFC set to  0.000000
4/11/2012	4:34:50 AM	SiCl4 MFC set to  0.000000
4/11/2012	4:34:50 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	4:34:50 AM	Tube furnace set to 0
4/11/2012	4:54:50 AM	Helium valve closed
4/11/2012	4:54:50 AM	H2 valve closed
4/11/2012	4:54:50 AM	BCl3 valve closed
4/11/2012	4:54:50 AM	PH3 valve closed
4/11/2012	4:54:50 AM	SiCl4 pre valve closed
4/11/2012	4:54:50 AM	SiCl4 post valve closed
4/11/2012	4:54:50 AM	Main Vac valve closed
4/11/2012	4:54:50 AM	Bubbler valve closed
4/11/2012	4:54:50 AM	Bypass valve opened
4/11/2012	4:54:50 AM	Helium MFC set to  0.000000
4/11/2012	4:54:50 AM	H2 MFC set to  0.000000
4/11/2012	4:54:50 AM	BCl3 MFC set to  0.000000
4/11/2012	4:54:50 AM	PH3 MFC set to  0.000000
4/11/2012	4:54:50 AM	SiCl4 MFC set to  0.000000
4/11/2012	4:54:50 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	4:54:50 AM	Tube furnace set to 0
4/11/2012	4:55:36 AM	Helium valve closed
4/11/2012	4:55:36 AM	H2 valve closed
4/11/2012	4:55:36 AM	BCl3 valve closed
4/11/2012	4:55:36 AM	PH3 valve closed
4/11/2012	4:55:36 AM	SiCl4 pre valve closed
4/11/2012	4:55:36 AM	SiCl4 post valve closed
4/11/2012	4:55:36 AM	Main Vac valve closed
4/11/2012	4:55:36 AM	Bubbler valve closed
4/11/2012	4:55:36 AM	Bypass valve opened
4/11/2012	4:55:36 AM	Helium MFC set to  0.000000
4/11/2012	4:55:36 AM	H2 MFC set to  0.000000
4/11/2012	4:55:36 AM	BCl3 MFC set to  0.000000
4/11/2012	4:55:36 AM	PH3 MFC set to  0.000000
4/11/2012	4:55:36 AM	SiCl4 MFC set to  0.000000
4/11/2012	4:55:36 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	4:55:36 AM	Tube furnace set to 0
4/11/2012	4:56:36 AM	Helium valve closed
4/11/2012	4:56:36 AM	H2 valve closed
4/11/2012	4:56:36 AM	BCl3 valve closed
4/11/2012	4:56:36 AM	PH3 valve closed
4/11/2012	4:56:36 AM	SiCl4 pre valve closed
4/11/2012	4:56:36 AM	SiCl4 post valve closed
4/11/2012	4:56:36 AM	Bypass valve closed
4/11/2012	4:56:36 AM	Bubbler valve closed
4/11/2012	4:56:36 AM	Main Vac valve opened
4/11/2012	4:56:36 AM	Helium MFC set to  0.000000
4/11/2012	4:56:36 AM	H2 MFC set to  0.000000
4/11/2012	4:56:36 AM	BCl3 MFC set to  0.000000
4/11/2012	4:56:36 AM	PH3 MFC set to  0.000000
4/11/2012	4:56:36 AM	SiCl4 MFC set to  0.000000
4/11/2012	4:56:36 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	4:56:36 AM	Tube furnace set to 0
4/11/2012	5:55:37 AM	Run aborted at 5:55 AM
4/11/2012	5:55:37 AM	Helium valve closed
4/11/2012	5:55:37 AM	H2 valve closed
4/11/2012	5:55:37 AM	BCl3 valve closed
4/11/2012	5:55:37 AM	PH3 valve closed
4/11/2012	5:55:37 AM	SiCl4 pre valve closed
4/11/2012	5:55:37 AM	SiCl4 post valve closed
4/11/2012	5:55:37 AM	Bypass valve closed
4/11/2012	5:55:37 AM	Main Vac valve closed
4/11/2012	5:55:37 AM	Bubbler valve closed
4/11/2012	5:55:37 AM	Helium MFC set to  0.000000
4/11/2012	5:55:37 AM	H2 MFC set to  0.000000
4/11/2012	5:55:37 AM	BCl3 MFC set to  0.000000
4/11/2012	5:55:37 AM	PH3 MFC set to  0.000000
4/11/2012	5:55:37 AM	SiCl4 MFC set to  0.000000
4/11/2012	5:55:38 AM	Tube furnace set to 0
4/11/2012	5:55:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2012	5:55:40 AM	Recipe started at 5:55 AM
4/11/2012	5:55:40 AM	Helium valve closed
4/11/2012	5:55:40 AM	H2 valve closed
4/11/2012	5:55:40 AM	BCl3 valve closed
4/11/2012	5:55:40 AM	PH3 valve closed
4/11/2012	5:55:40 AM	SiCl4 pre valve closed
4/11/2012	5:55:40 AM	SiCl4 post valve closed
4/11/2012	5:55:40 AM	Main Vac valve closed
4/11/2012	5:55:40 AM	Bypass valve closed
4/11/2012	5:55:40 AM	Bubbler valve closed
4/11/2012	5:55:40 AM	Helium MFC set to  0.000000
4/11/2012	5:55:40 AM	H2 MFC set to  0.000000
4/11/2012	5:55:40 AM	BCl3 MFC set to  0.000000
4/11/2012	5:55:40 AM	PH3 MFC set to  0.000000
4/11/2012	5:55:40 AM	SiCl4 MFC set to  0.000000
4/11/2012	5:55:40 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	5:55:40 AM	Tube furnace set to 0
4/11/2012	5:55:43 AM	H2 valve closed
4/11/2012	5:55:43 AM	BCl3 valve closed
4/11/2012	5:55:43 AM	PH3 valve closed
4/11/2012	5:55:43 AM	SiCl4 pre valve closed
4/11/2012	5:55:43 AM	SiCl4 post valve closed
4/11/2012	5:55:43 AM	Main Vac valve closed
4/11/2012	5:55:43 AM	Bypass valve closed
4/11/2012	5:55:43 AM	Bubbler valve closed
4/11/2012	5:55:43 AM	Helium valve opened
4/11/2012	5:55:43 AM	Helium MFC set to  500.000000
4/11/2012	5:55:43 AM	H2 MFC set to  0.000000
4/11/2012	5:55:43 AM	BCl3 MFC set to  0.000000
4/11/2012	5:55:43 AM	PH3 MFC set to  0.000000
4/11/2012	5:55:43 AM	SiCl4 MFC set to  0.000000
4/11/2012	5:55:43 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	5:55:44 AM	Tube furnace set to 0
4/11/2012	5:56:44 AM	Helium valve closed
4/11/2012	5:56:44 AM	H2 valve closed
4/11/2012	5:56:44 AM	BCl3 valve closed
4/11/2012	5:56:44 AM	PH3 valve closed
4/11/2012	5:56:44 AM	SiCl4 pre valve closed
4/11/2012	5:56:44 AM	SiCl4 post valve closed
4/11/2012	5:56:44 AM	Main Vac valve closed
4/11/2012	5:56:44 AM	Bypass valve closed
4/11/2012	5:56:44 AM	Bubbler valve closed
4/11/2012	5:56:44 AM	Helium MFC set to  0.000000
4/11/2012	5:56:44 AM	H2 MFC set to  0.000000
4/11/2012	5:56:44 AM	BCl3 MFC set to  0.000000
4/11/2012	5:56:44 AM	PH3 MFC set to  0.000000
4/11/2012	5:56:44 AM	SiCl4 MFC set to  0.000000
4/11/2012	5:56:44 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	5:56:44 AM	Tube furnace set to 0
4/11/2012	5:56:45 AM	Run finished at 5:56 AM
4/11/2012	5:56:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2012	6:00:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/11/2012	6:00:54 AM	Recipe started at 6:00 AM
4/11/2012	6:00:54 AM	Helium valve closed
4/11/2012	6:00:54 AM	H2 valve closed
4/11/2012	6:00:54 AM	BCl3 valve closed
4/11/2012	6:00:54 AM	PH3 valve closed
4/11/2012	6:00:54 AM	SiCl4 pre valve closed
4/11/2012	6:00:54 AM	SiCl4 post valve closed
4/11/2012	6:00:54 AM	Main Vac valve closed
4/11/2012	6:00:54 AM	Bubbler valve closed
4/11/2012	6:00:54 AM	Bypass valve opened
4/11/2012	6:00:54 AM	Helium MFC set to  0.000000
4/11/2012	6:00:54 AM	H2 MFC set to  0.000000
4/11/2012	6:00:54 AM	BCl3 MFC set to  0.000000
4/11/2012	6:00:55 AM	PH3 MFC set to  0.000000
4/11/2012	6:00:55 AM	SiCl4 MFC set to  0.000000
4/11/2012	6:00:55 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	6:00:55 AM	Tube furnace set to 0
4/11/2012	6:01:55 AM	Helium valve closed
4/11/2012	6:01:55 AM	H2 valve closed
4/11/2012	6:01:55 AM	BCl3 valve closed
4/11/2012	6:01:55 AM	PH3 valve closed
4/11/2012	6:01:55 AM	SiCl4 pre valve closed
4/11/2012	6:01:55 AM	SiCl4 post valve closed
4/11/2012	6:01:55 AM	Main Vac valve closed
4/11/2012	6:01:55 AM	Bubbler valve closed
4/11/2012	6:01:55 AM	Bypass valve opened
4/11/2012	6:01:55 AM	Helium MFC set to  0.000000
4/11/2012	6:01:55 AM	H2 MFC set to  0.000000
4/11/2012	6:01:55 AM	BCl3 MFC set to  0.000000
4/11/2012	6:01:55 AM	PH3 MFC set to  0.000000
4/11/2012	6:01:55 AM	SiCl4 MFC set to  0.000000
4/11/2012	6:01:55 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	6:01:55 AM	Tube furnace set to 0
4/11/2012	6:02:55 AM	Helium valve closed
4/11/2012	6:02:55 AM	H2 valve closed
4/11/2012	6:02:55 AM	BCl3 valve closed
4/11/2012	6:02:55 AM	PH3 valve closed
4/11/2012	6:02:55 AM	SiCl4 pre valve closed
4/11/2012	6:02:55 AM	SiCl4 post valve closed
4/11/2012	6:02:55 AM	Bypass valve closed
4/11/2012	6:02:55 AM	Bubbler valve closed
4/11/2012	6:02:55 AM	Main Vac valve opened
4/11/2012	6:02:55 AM	Helium MFC set to  0.000000
4/11/2012	6:02:55 AM	H2 MFC set to  0.000000
4/11/2012	6:02:55 AM	BCl3 MFC set to  0.000000
4/11/2012	6:02:55 AM	PH3 MFC set to  0.000000
4/11/2012	6:02:55 AM	SiCl4 MFC set to  0.000000
4/11/2012	6:02:55 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	6:02:55 AM	Tube furnace set to 0
4/11/2012	6:02:56 AM	Run finished at 6:02 AM
4/11/2012	6:02:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/11/2012	6:03:02 AM	Recipe started at 6:02 AM
4/11/2012	6:03:02 AM	Helium valve closed
4/11/2012	6:03:02 AM	H2 valve closed
4/11/2012	6:03:02 AM	BCl3 valve closed
4/11/2012	6:03:02 AM	PH3 valve closed
4/11/2012	6:03:02 AM	SiCl4 pre valve closed
4/11/2012	6:03:02 AM	SiCl4 post valve closed
4/11/2012	6:03:02 AM	Bypass valve closed
4/11/2012	6:03:02 AM	Bubbler valve closed
4/11/2012	6:03:02 AM	Main Vac valve opened
4/11/2012	6:03:02 AM	Helium MFC set to  0.000000
4/11/2012	6:03:02 AM	H2 MFC set to  0.000000
4/11/2012	6:03:02 AM	BCl3 MFC set to  0.000000
4/11/2012	6:03:02 AM	PH3 MFC set to  0.000000
4/11/2012	6:03:02 AM	SiCl4 MFC set to  0.000000
4/11/2012	6:03:02 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	6:03:02 AM	Tube furnace set to 0
4/11/2012	7:33:02 AM	Helium valve closed
4/11/2012	7:33:02 AM	H2 valve closed
4/11/2012	7:33:02 AM	BCl3 valve closed
4/11/2012	7:33:02 AM	PH3 valve closed
4/11/2012	7:33:02 AM	SiCl4 pre valve closed
4/11/2012	7:33:02 AM	SiCl4 post valve closed
4/11/2012	7:33:02 AM	Main Vac valve closed
4/11/2012	7:33:02 AM	Bypass valve closed
4/11/2012	7:33:02 AM	Bubbler valve closed
4/11/2012	7:33:02 AM	Helium MFC set to  0.000000
4/11/2012	7:33:02 AM	H2 MFC set to  0.000000
4/11/2012	7:33:02 AM	BCl3 MFC set to  0.000000
4/11/2012	7:33:02 AM	PH3 MFC set to  0.000000
4/11/2012	7:33:02 AM	SiCl4 MFC set to  0.000000
4/11/2012	7:33:02 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	7:33:02 AM	Tube furnace set to 0
4/11/2012	7:33:05 AM	Helium valve closed
4/11/2012	7:33:05 AM	BCl3 valve closed
4/11/2012	7:33:05 AM	PH3 valve closed
4/11/2012	7:33:05 AM	SiCl4 pre valve closed
4/11/2012	7:33:05 AM	SiCl4 post valve closed
4/11/2012	7:33:05 AM	Main Vac valve closed
4/11/2012	7:33:05 AM	Bypass valve closed
4/11/2012	7:33:05 AM	Bubbler valve closed
4/11/2012	7:33:05 AM	H2 valve opened
4/11/2012	7:33:05 AM	Helium MFC set to  0.000000
4/11/2012	7:33:05 AM	H2 MFC set to  500.000000
4/11/2012	7:33:05 AM	BCl3 MFC set to  0.000000
4/11/2012	7:33:05 AM	PH3 MFC set to  0.000000
4/11/2012	7:33:05 AM	SiCl4 MFC set to  0.000000
4/11/2012	7:33:05 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	7:33:06 AM	Tube furnace set to 0
4/11/2012	7:34:12 AM	Helium valve closed
4/11/2012	7:34:12 AM	BCl3 valve closed
4/11/2012	7:34:12 AM	PH3 valve closed
4/11/2012	7:34:12 AM	SiCl4 pre valve closed
4/11/2012	7:34:12 AM	SiCl4 post valve closed
4/11/2012	7:34:12 AM	Main Vac valve closed
4/11/2012	7:34:12 AM	Bypass valve closed
4/11/2012	7:34:12 AM	H2 valve opened
4/11/2012	7:34:12 AM	Bubbler valve opened
4/11/2012	7:34:12 AM	Helium MFC set to  0.000000
4/11/2012	7:34:12 AM	H2 MFC set to  500.000000
4/11/2012	7:34:12 AM	BCl3 MFC set to  0.000000
4/11/2012	7:34:12 AM	PH3 MFC set to  0.000000
4/11/2012	7:34:12 AM	SiCl4 MFC set to  0.000000
4/11/2012	7:34:12 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	7:34:12 AM	Tube furnace set to 0
4/11/2012	7:34:13 AM	Helium valve closed
4/11/2012	7:34:13 AM	BCl3 valve closed
4/11/2012	7:34:13 AM	PH3 valve closed
4/11/2012	7:34:13 AM	SiCl4 pre valve closed
4/11/2012	7:34:13 AM	SiCl4 post valve closed
4/11/2012	7:34:13 AM	Main Vac valve closed
4/11/2012	7:34:13 AM	Bypass valve closed
4/11/2012	7:34:13 AM	H2 valve opened
4/11/2012	7:34:13 AM	Bubbler valve opened
4/11/2012	7:34:13 AM	Helium MFC set to  0.000000
4/11/2012	7:34:13 AM	H2 MFC set to  500.000000
4/11/2012	7:34:13 AM	BCl3 MFC set to  0.000000
4/11/2012	7:34:13 AM	PH3 MFC set to  0.000000
4/11/2012	7:34:13 AM	SiCl4 MFC set to  0.000000
4/11/2012	7:34:13 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	7:34:14 AM	Tube furnace set to 1000
4/11/2012	7:59:13 AM	Helium valve closed
4/11/2012	7:59:13 AM	PH3 valve closed
4/11/2012	7:59:13 AM	Main Vac valve closed
4/11/2012	7:59:13 AM	Bypass valve closed
4/11/2012	7:59:13 AM	H2 valve opened
4/11/2012	7:59:13 AM	BCl3 valve opened
4/11/2012	7:59:14 AM	SiCl4 pre valve opened
4/11/2012	7:59:14 AM	SiCl4 post valve opened
4/11/2012	7:59:14 AM	Bubbler valve opened
4/11/2012	7:59:14 AM	Helium MFC set to  0.000000
4/11/2012	7:59:14 AM	H2 MFC set to  450.000000
4/11/2012	7:59:14 AM	BCl3 MFC set to  1.000000
4/11/2012	7:59:14 AM	PH3 MFC set to  0.000000
4/11/2012	7:59:14 AM	SiCl4 MFC set to  50.000000
4/11/2012	7:59:14 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	7:59:14 AM	Tube furnace set to 1000
4/11/2012	8:28:14 AM	Helium valve closed
4/11/2012	8:28:14 AM	BCl3 valve closed
4/11/2012	8:28:14 AM	PH3 valve closed
4/11/2012	8:28:14 AM	SiCl4 pre valve closed
4/11/2012	8:28:14 AM	SiCl4 post valve closed
4/11/2012	8:28:14 AM	Main Vac valve closed
4/11/2012	8:28:14 AM	Bypass valve closed
4/11/2012	8:28:14 AM	H2 valve opened
4/11/2012	8:28:14 AM	Bubbler valve opened
4/11/2012	8:28:14 AM	Helium MFC set to  0.000000
4/11/2012	8:28:14 AM	H2 MFC set to  500.000000
4/11/2012	8:28:14 AM	BCl3 MFC set to  0.000000
4/11/2012	8:28:14 AM	PH3 MFC set to  0.000000
4/11/2012	8:28:14 AM	SiCl4 MFC set to  0.000000
4/11/2012	8:28:14 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	8:28:14 AM	Tube furnace set to 750
4/11/2012	8:43:14 AM	H2 valve closed
4/11/2012	8:43:14 AM	BCl3 valve closed
4/11/2012	8:43:14 AM	PH3 valve closed
4/11/2012	8:43:14 AM	SiCl4 pre valve closed
4/11/2012	8:43:14 AM	SiCl4 post valve closed
4/11/2012	8:43:14 AM	Main Vac valve closed
4/11/2012	8:43:14 AM	Bypass valve closed
4/11/2012	8:43:14 AM	Helium valve opened
4/11/2012	8:43:14 AM	Bubbler valve opened
4/11/2012	8:43:14 AM	Helium MFC set to  500.000000
4/11/2012	8:43:14 AM	H2 MFC set to  0.000000
4/11/2012	8:43:14 AM	BCl3 MFC set to  0.000000
4/11/2012	8:43:14 AM	PH3 MFC set to  0.000000
4/11/2012	8:43:14 AM	SiCl4 MFC set to  0.000000
4/11/2012	8:43:14 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	8:43:14 AM	Tube furnace set to 0
4/11/2012	9:03:14 AM	Helium valve closed
4/11/2012	9:03:14 AM	H2 valve closed
4/11/2012	9:03:14 AM	BCl3 valve closed
4/11/2012	9:03:14 AM	PH3 valve closed
4/11/2012	9:03:14 AM	SiCl4 pre valve closed
4/11/2012	9:03:14 AM	SiCl4 post valve closed
4/11/2012	9:03:14 AM	Main Vac valve closed
4/11/2012	9:03:14 AM	Bypass valve closed
4/11/2012	9:03:14 AM	Bubbler valve closed
4/11/2012	9:03:14 AM	Helium MFC set to  0.000000
4/11/2012	9:03:14 AM	H2 MFC set to  0.000000
4/11/2012	9:03:14 AM	BCl3 MFC set to  0.000000
4/11/2012	9:03:14 AM	PH3 MFC set to  0.000000
4/11/2012	9:03:14 AM	SiCl4 MFC set to  0.000000
4/11/2012	9:03:14 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	9:03:14 AM	Tube furnace set to 0
4/11/2012	9:23:14 AM	Helium valve closed
4/11/2012	9:23:14 AM	H2 valve closed
4/11/2012	9:23:14 AM	BCl3 valve closed
4/11/2012	9:23:14 AM	PH3 valve closed
4/11/2012	9:23:14 AM	SiCl4 pre valve closed
4/11/2012	9:23:14 AM	SiCl4 post valve closed
4/11/2012	9:23:14 AM	Main Vac valve closed
4/11/2012	9:23:14 AM	Bubbler valve closed
4/11/2012	9:23:14 AM	Bypass valve opened
4/11/2012	9:23:14 AM	Helium MFC set to  0.000000
4/11/2012	9:23:14 AM	H2 MFC set to  0.000000
4/11/2012	9:23:14 AM	BCl3 MFC set to  0.000000
4/11/2012	9:23:14 AM	PH3 MFC set to  0.000000
4/11/2012	9:23:14 AM	SiCl4 MFC set to  0.000000
4/11/2012	9:23:14 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	9:23:14 AM	Tube furnace set to 0
4/11/2012	9:23:59 AM	Helium valve closed
4/11/2012	9:23:59 AM	H2 valve closed
4/11/2012	9:23:59 AM	BCl3 valve closed
4/11/2012	9:23:59 AM	PH3 valve closed
4/11/2012	9:23:59 AM	SiCl4 pre valve closed
4/11/2012	9:23:59 AM	SiCl4 post valve closed
4/11/2012	9:23:59 AM	Main Vac valve closed
4/11/2012	9:23:59 AM	Bubbler valve closed
4/11/2012	9:23:59 AM	Bypass valve opened
4/11/2012	9:23:59 AM	Helium MFC set to  0.000000
4/11/2012	9:23:59 AM	H2 MFC set to  0.000000
4/11/2012	9:23:59 AM	BCl3 MFC set to  0.000000
4/11/2012	9:23:59 AM	PH3 MFC set to  0.000000
4/11/2012	9:23:59 AM	SiCl4 MFC set to  0.000000
4/11/2012	9:23:59 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	9:23:59 AM	Tube furnace set to 0
4/11/2012	9:24:59 AM	Helium valve closed
4/11/2012	9:24:59 AM	H2 valve closed
4/11/2012	9:24:59 AM	BCl3 valve closed
4/11/2012	9:24:59 AM	PH3 valve closed
4/11/2012	9:24:59 AM	SiCl4 pre valve closed
4/11/2012	9:24:59 AM	SiCl4 post valve closed
4/11/2012	9:24:59 AM	Bypass valve closed
4/11/2012	9:24:59 AM	Bubbler valve closed
4/11/2012	9:24:59 AM	Main Vac valve opened
4/11/2012	9:24:59 AM	Helium MFC set to  0.000000
4/11/2012	9:24:59 AM	H2 MFC set to  0.000000
4/11/2012	9:24:59 AM	BCl3 MFC set to  0.000000
4/11/2012	9:24:59 AM	PH3 MFC set to  0.000000
4/11/2012	9:24:59 AM	SiCl4 MFC set to  0.000000
4/11/2012	9:24:59 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	9:25:00 AM	Tube furnace set to 0
4/11/2012	10:11:11 AM	Run aborted at 10:11 AM
4/11/2012	10:11:11 AM	Helium valve closed
4/11/2012	10:11:11 AM	H2 valve closed
4/11/2012	10:11:11 AM	BCl3 valve closed
4/11/2012	10:11:11 AM	PH3 valve closed
4/11/2012	10:11:11 AM	SiCl4 pre valve closed
4/11/2012	10:11:11 AM	SiCl4 post valve closed
4/11/2012	10:11:11 AM	Bypass valve closed
4/11/2012	10:11:11 AM	Main Vac valve closed
4/11/2012	10:11:11 AM	Bubbler valve closed
4/11/2012	10:11:11 AM	Helium MFC set to  0.000000
4/11/2012	10:11:11 AM	H2 MFC set to  0.000000
4/11/2012	10:11:11 AM	BCl3 MFC set to  0.000000
4/11/2012	10:11:11 AM	PH3 MFC set to  0.000000
4/11/2012	10:11:11 AM	SiCl4 MFC set to  0.000000
4/11/2012	10:11:11 AM	Tube furnace set to 0
4/11/2012	10:11:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2012	10:11:20 AM	Recipe started at 10:11 AM
4/11/2012	10:11:20 AM	Helium valve closed
4/11/2012	10:11:20 AM	H2 valve closed
4/11/2012	10:11:20 AM	BCl3 valve closed
4/11/2012	10:11:20 AM	PH3 valve closed
4/11/2012	10:11:20 AM	SiCl4 pre valve closed
4/11/2012	10:11:20 AM	SiCl4 post valve closed
4/11/2012	10:11:20 AM	Main Vac valve closed
4/11/2012	10:11:20 AM	Bypass valve closed
4/11/2012	10:11:20 AM	Bubbler valve closed
4/11/2012	10:11:20 AM	Helium MFC set to  0.000000
4/11/2012	10:11:20 AM	H2 MFC set to  0.000000
4/11/2012	10:11:20 AM	BCl3 MFC set to  0.000000
4/11/2012	10:11:20 AM	PH3 MFC set to  0.000000
4/11/2012	10:11:20 AM	SiCl4 MFC set to  0.000000
4/11/2012	10:11:20 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	10:11:20 AM	Tube furnace set to 0
4/11/2012	10:11:23 AM	H2 valve closed
4/11/2012	10:11:23 AM	BCl3 valve closed
4/11/2012	10:11:23 AM	PH3 valve closed
4/11/2012	10:11:23 AM	SiCl4 pre valve closed
4/11/2012	10:11:23 AM	SiCl4 post valve closed
4/11/2012	10:11:23 AM	Main Vac valve closed
4/11/2012	10:11:23 AM	Bypass valve closed
4/11/2012	10:11:23 AM	Bubbler valve closed
4/11/2012	10:11:23 AM	Helium valve opened
4/11/2012	10:11:23 AM	Helium MFC set to  500.000000
4/11/2012	10:11:23 AM	H2 MFC set to  0.000000
4/11/2012	10:11:23 AM	BCl3 MFC set to  0.000000
4/11/2012	10:11:23 AM	PH3 MFC set to  0.000000
4/11/2012	10:11:23 AM	SiCl4 MFC set to  0.000000
4/11/2012	10:11:23 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	10:11:24 AM	Tube furnace set to 0
4/11/2012	10:12:25 AM	Helium valve closed
4/11/2012	10:12:25 AM	H2 valve closed
4/11/2012	10:12:25 AM	BCl3 valve closed
4/11/2012	10:12:25 AM	PH3 valve closed
4/11/2012	10:12:25 AM	SiCl4 pre valve closed
4/11/2012	10:12:25 AM	SiCl4 post valve closed
4/11/2012	10:12:25 AM	Main Vac valve closed
4/11/2012	10:12:25 AM	Bypass valve closed
4/11/2012	10:12:25 AM	Bubbler valve closed
4/11/2012	10:12:25 AM	Helium MFC set to  0.000000
4/11/2012	10:12:25 AM	H2 MFC set to  0.000000
4/11/2012	10:12:25 AM	BCl3 MFC set to  0.000000
4/11/2012	10:12:25 AM	PH3 MFC set to  0.000000
4/11/2012	10:12:25 AM	SiCl4 MFC set to  0.000000
4/11/2012	10:12:25 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	10:12:25 AM	Tube furnace set to 0
4/11/2012	10:12:26 AM	Run finished at 10:12 AM
4/11/2012	10:12:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2012	10:14:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/11/2012	10:14:43 AM	Recipe started at 10:14 AM
4/11/2012	10:14:43 AM	Helium valve closed
4/11/2012	10:14:43 AM	H2 valve closed
4/11/2012	10:14:43 AM	BCl3 valve closed
4/11/2012	10:14:43 AM	PH3 valve closed
4/11/2012	10:14:43 AM	SiCl4 pre valve closed
4/11/2012	10:14:43 AM	SiCl4 post valve closed
4/11/2012	10:14:43 AM	Main Vac valve closed
4/11/2012	10:14:43 AM	Bubbler valve closed
4/11/2012	10:14:43 AM	Bypass valve opened
4/11/2012	10:14:43 AM	Helium MFC set to  0.000000
4/11/2012	10:14:43 AM	H2 MFC set to  0.000000
4/11/2012	10:14:43 AM	BCl3 MFC set to  0.000000
4/11/2012	10:14:43 AM	PH3 MFC set to  0.000000
4/11/2012	10:14:43 AM	SiCl4 MFC set to  0.000000
4/11/2012	10:14:43 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	10:14:43 AM	Tube furnace set to 0
4/11/2012	10:15:44 AM	Helium valve closed
4/11/2012	10:15:44 AM	H2 valve closed
4/11/2012	10:15:44 AM	BCl3 valve closed
4/11/2012	10:15:44 AM	PH3 valve closed
4/11/2012	10:15:44 AM	SiCl4 pre valve closed
4/11/2012	10:15:44 AM	SiCl4 post valve closed
4/11/2012	10:15:44 AM	Main Vac valve closed
4/11/2012	10:15:44 AM	Bubbler valve closed
4/11/2012	10:15:44 AM	Bypass valve opened
4/11/2012	10:15:44 AM	Helium MFC set to  0.000000
4/11/2012	10:15:44 AM	H2 MFC set to  0.000000
4/11/2012	10:15:44 AM	BCl3 MFC set to  0.000000
4/11/2012	10:15:44 AM	PH3 MFC set to  0.000000
4/11/2012	10:15:44 AM	SiCl4 MFC set to  0.000000
4/11/2012	10:15:44 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	10:15:45 AM	Tube furnace set to 0
4/11/2012	10:16:45 AM	Helium valve closed
4/11/2012	10:16:45 AM	H2 valve closed
4/11/2012	10:16:45 AM	BCl3 valve closed
4/11/2012	10:16:45 AM	PH3 valve closed
4/11/2012	10:16:45 AM	SiCl4 pre valve closed
4/11/2012	10:16:45 AM	SiCl4 post valve closed
4/11/2012	10:16:45 AM	Bypass valve closed
4/11/2012	10:16:45 AM	Bubbler valve closed
4/11/2012	10:16:45 AM	Main Vac valve opened
4/11/2012	10:16:45 AM	Helium MFC set to  0.000000
4/11/2012	10:16:45 AM	H2 MFC set to  0.000000
4/11/2012	10:16:45 AM	BCl3 MFC set to  0.000000
4/11/2012	10:16:45 AM	PH3 MFC set to  0.000000
4/11/2012	10:16:45 AM	SiCl4 MFC set to  0.000000
4/11/2012	10:16:45 AM	Bypass solenoid MFC set to  0.000000
4/11/2012	10:16:45 AM	Tube furnace set to 0
4/11/2012	10:16:46 AM	Run finished at 10:16 AM
4/11/2012	10:16:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
